The present invention provides an apparatus. The apparatus, in one
embodiment, includes an actuator located over a substrate, a movable
feature located over and coupled to the actuator, and a layer of material
located above the actuator and movable feature and not constituting part
of a beam/spring associated with the movable feature, the layer of
material configured as a reservoir having an interior capable of holding
a liquid, the movable feature being exposed to the interior.