The present invention is directed to structures and methods of fabricating
electromechanical memory cells having nanotube crossbar elements. Such
memory cells include a substrate having transistor with a contact that
electrically contacts with the transistor. A first support layer is
formed over the substrate with an opening that defines a lower chamber
above the electrical contact. A nanotube crossbar element is arranged to
span the lower chamber. A second support layer is formed with an opening
that defines a top chamber above the lower chamber, the top chamber
including an extension region that extends beyond an edge of the lower
chamber to expose a portion of the top surface of the first support
layer. A roof layer covers the top of the top chamber and includes an
aperture that exposes a portion of the extension region of the top
chamber and includes a plug that extends into the aperture in the roof
layer to seal the top and bottom chambers. The memory cell further
includes an electrode that overlies the crossbar element such that
electrical signals can activate the electrode to attract or repel the
crossbar element to set a memory state for the transistor.