The disclosure relates generally to integrated circuit (IC) chip
fabrication, and more particularly, to an e-fuse device including an
opening, a first via and a second via in an interlayer dielectric,
wherein the opening, the first via and the second via are connected to an
interconnect below the interlayer dielectric; a dielectric layer that
encloses the first via and the second via; and a metal layer over the
dielectric layer, wherein the metal layer fills the opening with a metal,
and wherein the first via and the second via are substantially empty to
allow for electromigration of the interconnect during re-programming of
the e-fuse device.