Air-gap insulated interconnection structures and methods of fabricating
the structures, the methods including: forming a dielectric layer on a
substrate; forming a capping layer on a top surface of the dielectric
layer; forming a trench through the capping layer, the trench extending
toward said substrate and into but not through, the dielectric layer;
forming a sacrificial layer on opposing sidewalls of the trench; filling
the trench with a electrical conductor; and removing a portion of the
sacrificial layer from between the electrical conductor and the
dielectric layer to form air-gaps.