A resist protective coating material comprises a polymer comprising repeat units having formulae (1a) and (1b) and having a Mw of 1,000-500,000. R.sup.1a and R.sup.1b are H, F or alkyl or fluoroalkyl, R.sup.2a, R.sup.2b, R.sup.3a and R.sup.3b are H or alkyl, or R.sup.2a and R.sup.2b, and R.sup.3a and R.sup.3b may bond together to form a ring, 0