A microcontact printing tool having a print unit including a stamp head
with a stamp and a wafer chuck for retaining a substrate. The stamp
contained by the stamped head movable relative to the substrate by an
actuator and a stage. A plurality of sensors detect the position of the
stamp relative to substrate. A method of using the printing tool that
includes a real-time feedback for consistent and accurate application of
force during the printing of the substrate. The stamp head includes a
pressure chamber carrying the stamp. The stamp backing is deflected prior
to contact of the stamp with the substrate to form a minimum point and
the stamp backing and the stamp is returned to a plane to create a
printing propagation contact. An apparatus has a master backing and a
stamping backing in close proximity and the stamp material drawn in
through a vacuum. The stamp is separated from the master by use of a
parting fluid.