Method and apparatus for compensating an integrated circuit design for
mechanical stress effects. One aspect of the invention relates to
designing an integrated circuit. Layout data is obtained that describes
layers of the integrated circuit. At least one of the layers is analyzed
to detect at least one structure susceptible to damage from mechanical
stress. A bias is automatically added to each of the at least one
structure to reduce mechanical stress of the at least one structure as
fabricated. Augmented layout data is then provided for the integrated
circuit.