A method of forming at least a portion of a dual bit memory core array
upon a semiconductor substrate, the method comprising performing front
end processing, performing a first bitline implant, or pocket implants,
or both into the first bitline spacings to establish buried first
bitlines within the substrate, depositing a layer of the spacer material
over the charge trapping dielectric and the polysilicon layer features,
forming a sidewall spacer adjacent to the charge trapping dielectric and
the polysilicon layer features to define second bitline spacings between
adjacent memory cells, performing a deep arsenic implant into the second
bitline spacings to establish a second bitline within the structure that
is deeper than the first bit line, removing the sidewall spacers and
performing back end processing.