An exemplary method for fabricating a polysilicon layer includes the
following steps. A substrate (10) is provided and an amorphous silicon
layer (12) is formed over the substrate. An excimer laser generator (13)
for generating a pulse excimer laser beams collectively having the shape
of a generally rectangular shaft is provided to melt a first area (15) of
the amorphous silicon layer with the pulse excimer laser beams. The
excimer laser generator is moved a distance to melt a second area of the
amorphous layer spaced a short distance away from the first area. At
least a subsequent third melted area spaced a short distance away from
the second melted area is formed, with each subsequent melted area is
spaced as short distance away from the immediately preceding melted area.