An apparatus for making an array of carbon nanotubes includes a reaction
chamber with a gas inlet and a gas outlet; a quartz boat disposed in the
reaction chamber; a substrate with a surface deposited with a film of
first catalyst, the substrate being disposed in the quartz boat; and a
second catalyst disposed in the quartz beside the substrate. A method for
making an array of carbon nanotubes, comprising the steps of: (a)
providing a substrate with a surface deposited with a film of first
catalyst; (b) disposing a second catalyst beside the substrate to produce
small amounts of hydrogen gas which flows to the first catalyst; (c)
introducing a carrier gas and a carbon source gas flowing from the second
catalyst to the first catalyst at a predetermined temperature; and (d)
growing an array of carbon nanotubes extending from the substrate.