To provide a less expensive and high-efficient free-piston Stirling cycle machine with an outer diameter of entire machine being relatively small. In a Stirling cycle cooler as a free-piston Stirling cycle machine including a cylinder 7, a piston 18 which is reciprocable inside said cylinder 7 and an electromagnetic driving mechanism 19 for reciprocating said piston 18, said electromagnetic driving mechanism 19 is comprised of a mover 20 and a stator 35, said piston 18 and said mover 20 formed by disposing a permanent magnets 24 outside an inner yoke 23 made of magnetic flux conducting material are disposed in an axial alignment, and said stator 35 and said cylinder 7 are disposed in an axial alignment. By this disposition, the outer diameter Rm of said mover 20 of said electromagnetic driving mechanism 19 can be reduced, and consequently the inner diameter Rs and the outer diameter of said stator 35 provided outside said mover 20, eventually the outer diameter of entire Stirling cycle cooler can also be reduced.