A catheter with many fiber optic pressure sensors. The sensor diaphragm is
formed from a wafer with a thin silicon layer and a silicon substrate
layer separated by a silicon dioxide layer. A method includes masking and
etching channels through the silicon substrate layer in a pattern of
concentric circles to form a concentric circular etched channels and
cylindrical unetched portions of the silicon substrate layer between the
channels, exposing the silicon dioxide in the etched regions, and
dissolving the exposed silicon dioxide to expose the crystalline silicon
layer in the etched regions. The unetched cylindrical portion of the
silicon substrate forms the diaphragm support element and the thin
silicon layer forms the diaphragm. After applying a reflective coating to
the exposed thin silicon layer, the support element face is adhered to
the end face of a tubular housing, and a fiber optic probe is inserted in
the tubular housing.