A semiconductor device manufacturing method includes forming circuit
devices and a plurality of electrode pads within a semiconductor chip
formation region. The method also includes forming, on the main surface
of the semiconductor wafer, an insulating film which exposes a portion of
each of the electrode pads. The method also includes forming a conducting
film covering the electrode pads, on the insulating film, and forming a
wiring layer on the conducting film. The method also includes forming a
negative resist layer in the semiconductor chip formation region and a
peripheral region. The method also includes covering protruding electrode
formation regions in the semiconductor chip formation region and covering
electrode portion formation regions in the peripheral region, and
performing optical exposure of the negative resist layer. The method also
includes forming aperture portions in the protruding electrode formation
regions and a plurality of electrode portions. The aperture portions
expose a portion of the wiring layer. The electrode portions are formed
by exposing the conducting film. The method also includes performing
plating using the resist layer as a mask to form protruding electrodes.