Nanoelectromechanical transistors (NEMTs) and methods of forming the same
are disclosed. In one embodiment, an NEMT may include a substrate
including a gate adjacent thereto, a source region and a drain region; an
electromechanically deflectable nanotube member; and a channel member
electrically insulatively coupled to the nanotube member so as to be
aligned with the source region and the drain region, wherein
electromechanical deflection of the nanotube member is controllable, in
response to an electrical potential applied to the gate and the nanotube
member, between an off state and an on state, the on state placing the
channel member in electrical connection with the source region and the
drain region to form a current path.