The present invention relates to a laser fuse structure for high power
applications. Specifically, the laser fuse structure of the present
invention comprises first and second conductive supporting elements (12a,
12b), at least one conductive fusible link (14), first and second
connection elements (20a, 20b), and first and second metal lines (22a,
22b). The conductive supporting elements (12a, 12b), the conductive
fusible link (14), and the metal lines (22a, 22b) are located at a first
metal level (3), while the connect elements (20a, 20b) are located at a
second, different metal level (4) and are connected to the conductive
supporting elements (12a, 12b) and the metal lines (22a, 22b) by
conductive via stacks (18a, 18b, 23a, 23b) that extend between the first
and second metal levels (3, 4).