Stitched integrated circuit (IC) chip layout methods, systems and program
products are disclosed. In one embodiment, a method includes obtaining
from a first entity a circuit design for an IC chip layout that exceeds a
size of a photolithography tool field at a second entity, wherein the IC
chip layout includes for at least one stitched region of a plurality of
stitched regions: a boundary identification identifying a boundary of the
at least one stitched region at which stitching occurs and a type
indicator indicating whether the at least one stitched region is one of:
redundant and unique; dissecting the IC chip layout into stitched regions
indicated as unique or redundant at the second entity; and generating a
photolithographic reticle at the second entity based on the plurality of
stitched regions, the photolithographic reticle having a size that fits
within the size of the photolithographic tool field at the second entity.