A method for forming a contact to a substrate is disclosed. The method
includes providing a substrate, the substrate being doped with a first
dopant; and diffusing a second dopant into at least a first side of the
substrate to form a second dopant region, the first side further
including a first side surface area. The method also includes forming a
dielectric layer on the first side of the substrate. The method further
includes forming a set of composite layer regions on the dielectric
layer, wherein each composite layer region of the set of composite layer
regions further includes a set of Group IV semiconductor nanoparticles
and a set of metal particles. The method also includes heating the set of
composite layer regions to a first temperature, wherein at least some
composite layer regions of the set of composite layer regions etch
through the dielectric layer and form a set of contacts with the second
dopant region.