Resistive switching memory elements are provided that may contain
electroless metal electrodes and metal oxides formed from electroless
metal. The resistive switching memory elements may exhibit bistability
and may be used in high-density multi-layer memory integrated circuits.
Electroless conductive materials such as nickel-based materials may be
selectively deposited on a conductor on a silicon wafer or other suitable
substrate. The electroless conductive materials can be oxidized to form a
metal oxide for a resistive switching memory element. Multiple layers of
conductive materials can be deposited each of which has a different
oxidation rate. The differential oxidization rates of the conductive
layers can be exploited to ensure that metal oxide layers of desired
thicknesses are formed during fabrication.