A method for fabricating a disc stamper is provided. First, a substrate is
provided. Next, a layer of a coatable inorganic material is coated on the
substrate, wherein the coatable inorganic material is an oxide, in which
the chemical element constitution is more than one element selected from
the group consisting of Te, Al, Zr, and Ti. Next, a laser beam is
utilized to perform direct write on the layer of the coatable inorganic
material to form a relief pattern. Thereafter, a metal layer is
electroplated on the relief pattern. Next, the metal layer is separated
from the relief pattern. The layer of the coatable inorganic material is
utilized to form the relief pattern, so that it is more compatibility to
equipment apparatus and lower cost in contrast with sputtered PTM
process.