A phase change memory is provided. The method includes forming contact
plugs in a first dielectric layer. A second dielectric layer is formed
overlying the first dielectric layer and a trench formed therein exposing
portions of the contact plugs. A metal layer is formed over surfaces of
the trench. One or more heaters are formed from the metal layer such that
each heater is formed along one or more sidewalls and a portion of the
bottom of the trench, wherein the portion of the heater along the
sidewalls does not include a corner region of adjacent sidewalls. The
trench is filled with a third dielectric layer, and a fourth dielectric
layer is formed over the third dielectric layer. Trenches are formed in
the fourth dielectric layer and filled with a phase change material. An
electrode is formed over the phase change material.