A semiconductor device includes a laminated substrate formed by laminating
a plurality of semiconductor substrates, a concave part formed in the
laminated substrate, and a semiconductor element mounted in the concave
part. A method of manufacturing a semiconductor device includes a first
step of forming a laminated substrate by laminating a plurality of
semiconductor substrates, a second step of forming a concave part by
etching the laminated substrate, and a third step of mounting a
semiconductor element in the concave part.