A nitride semiconductor device according to the present invention includes
a P-type contact layer and a P-type electrode provided on the P-type
contact layer. The P-type electrode includes a AuGa film provided on the
P-type contact layer, a Au film provided on the AuGa film, a Pt film 4
provided on the Au film, and a Au film provided on the Pt film. The ratio
of the thickness of the AuGa film to the total thickness of the AuGa film
and the Au film is not less than 12% but not more than 46%.