A method for making an array of carbon nanotubes includes the steps of:
(a) providing a substrate with a film of catalyst provided thereon; (b)
disposing the substrate in a reaction chamber; (c) introducing a carrier
gas into the reaction chamber and heating the reaction chamber to a
predetermined temperature; (d) introducing a carbon source gas and a
hydrogen gas into the reaction chamber separately and simultaneously; the
hydrogen gas being introduced such that the hydrogen gas has less of a
distance to travel in the reaction chamber than does the carbon source
gas to reach the substrate; and (e) growing the array of the carbon
nanotubes from the substrate.