A microelectromechanical (MEMS) device includes at least one electrode, a
first reflective layer, and a movable reflective element. The movable
reflective element includes a flexible dielectric layer and a second
reflective layer mechanically coupled to the flexible dielectric layer.
The flexible dielectric layer flexes in response to voltages applied to
the at least one electrode to move the reflective element in a direction
generally perpendicular to the first reflective layer.