The detachment of a semiconductor chip (1) from a foil (4) and picking the
semiconductor chip (1) from the foil (4) takes place with the support of
a chip ejector (6), that has a ramp (16), the surface (17) of which is
formed concave and ends at a stripping edge (18) projecting from the
surface (9) of the chip ejector (6), and a support area (13) with grooves
(12) arranged next to the stripping edge (18). Vacuum can be applied to
the grooves (12). The detachment and picking of the semiconductor chip
(1) from the foil (4) takes place in that the wafer table (5) is shifted
relative to the chip ejector (6) in order to pull the foil (4) over the
stripping edge (18) protruding from the surface (9) of the chip ejector
(6), whereby the semiconductor chip (1) temporarily detaches itself at
least partially from the foil (4) and lands on the foil (4) above the
support area (13), and in that the chip gripper (7) picks the
semiconductor chip (1) presented on the support area (13).