One embodiment of the present invention determines the effect of placing
an assist feature at a location in a layout. During operation, the system
receives a first value which was pre-computed by convolving a model with
a layout at an evaluation point, wherein the model models semiconductor
manufacturing processes. Next, the system determines a second value by
convolving the model with an assist feature, which is assumed to be
located at a first location which is in proximity to the evaluation
point. The system then determines the effect of placing an assist feature
using the first value and the second value. An embodiment of the present
invention can be used to determine a substantially optimal location for
placing an assist feature in a layout.