A probe system that has a probe body comprising at least three arms
extending from a central region and a probe tip centrally located on the
probe body in the central region. A substrate is proximate the probe body
opposite the probe tip. A first electrode is positioned to provide a
centrally positioned voltage across the probe body and the substrate and
a second electrode set is positioned radially outward from the first
electrode, to provide an outer voltage across at least one of the at
least three arms and the substrate. The probe structure may have, for
example, four arms. Methods of actuating the probe tip are provided.