A pump ring. The pump ring is suitable for a reaction chamber and capable
for extracting gas from the reaction chamber in a uniform gas flow rate.
The pump ring comprises a ring body and a top ring part located on the
ring body. The top ring part is apart from an inner wall of the reaction
chamber with a fixed distance. Therefore, a gas-extraction path composed
of the reaction chamber, the ring body and the top ring part is
unobstructed. Hence, the turbulence flow of the extracted gas can be
efficiently suppressed and the problems of the accumulation of the
impurities and reaction chamber contamination can be solved.