Structures including a self-aligned strap for embedded trench memory
(e.g., trench capacitor) on hybrid orientation technology (HOT)
substrate, and related method, are disclosed. One structure includes a
hybrid orientation substrate including a semiconductor-on-insulator (SOI)
section and a bulk semiconductor section; a transistor over the SOI
section; a trench capacitor in the bulk semiconductor section; and a
self-aligned strap extending from a source/drain region of the transistor
to an electrode of the trench capacitor. The method does not require
additional masks to generate the strap, results in a self-aligned strap
and improved device performance. In one embodiment, the strap is a
silicide strap.