A bonding apparatus (10) that bonds an electrode of a semiconductor die
(12) and an electrode of a circuit board (19) using a metal nano paste
includes a bump formation mechanism (20) that forms bump by injecting
microdroplets of a metal nano paste on each electrode, a primary bonding
mechanism (50) that carries out primary bonding to the electrodes in a
non-conductive state by pressing the bump of the semiconductor die (12)
against the bump of the circuit board (19), and a secondary bonding
mechanism (80) that carries out secondary bonding so that the electrodes
become conductive by pressurizing the primary bonded bump in bonding
direction and by heating the bump to pressurize and sinter the metal
nanoparticles in the bump. With this, it is possible to efficiently bond
the electrodes with a simple and easy way while reducing a bonding load.