Provided is a floating gate having multiple charge storing layers, a
non-volatile memory device using the same, and a method of fabricating
the floating gate and the non-volatile memory device, in which the
multiple charge storing layers using metal nano-crystals of nano size is
formed to thereby enhance a charge storage capacity of the memory device.
The floating gate includes a polymer electrolytic film which is deposited
on a tunneling oxide film, and is formed of at least one stage in which
at least one thin film is deposited on each stage, and at least one metal
nano-crystal film which is self-assembled on the upper surface of each
stage of the polymer electrolytic film and on which a number of metal
nano-crystals for trapping charges are deposited. The floating gate is
made by self-assembling the metal nano-crystals on the polymer
electrolytic film, and thus can be fabricated without undergoing a heat
treatment process at high temperature.