A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.

 
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< Laminated absorbent product with increased strength in defined areas

< Combined information display and information input device

> MEMS devices and processes for packaging such devices

> Fresnel optical element and projection display apparatus

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