A machine for cleaning containers has inside and outside arrays of nozzles
arranged to spray a cleaning solution onto containers supported on a
spinning rotor. Used cleaning solution is diverted to a reclaim tank for
reuse, thereby allowing low-cost cleaning with concentrated chemicals, and
with the creation of less liquid waste requiring disposal. In a method for
removing contaminants from flat media or silicon wafer containers or
carriers, a mixture of surfactant and de-ionized water is sprayed onto
containers on a spinning rotor. The used cleaning solution is collected,
filtered and reused.