A typical integrated circuit interconnects millions of microscopic
transistors and resistors with aluminum wires buried in silicon-dioxide
insulation. Yet, aluminum wires and silicon-dioxide insulation are a less
attractive combination than gold, silver, or copper wires combined with
polymer-based insulation, which promise both lower electrical resistance
and capacitance and thus faster, more efficient circuits. Unfortunately,
conventional etch-base techniques are ineffective with gold, silver, or
copper, and conventional polymer formation promote reactions with metals
that undermine the insulative properties of polymer-based insulations.
Accordingly, the inventor devised methods which use a liftoff procedure to
avoid etching problems and a non-acid-polymeric precursor and
non-oxidizing cure procedure to preserve the insulative properties of the
polymeric insulator. The resulting interconnective structures facilitate
integrated circuits with better speed and efficiency.