An integrated circuit and manufacturing method therefor is provided having
a semiconductor substrate with a semiconductor device. A device dielectric
layer is formed on the semiconductor substrate and a channel dielectric
layer on the device dielectric layer has an opening formed therein. A
barrier layer lines the channel opening and a conductor core fills the
opening over the barrier layer. A seedless barrier layer lines the
opening, and a conductor core fills the opening over the seedless barrier
layer. The barrier layer is deposited in the opening and contains atomic
layers of barrier material which bonds to the dielectric layer, an
intermediate material which bonds to the barrier material layer and to the
conductor core, and a conductor core material which bonds to the
intermediate material. The conductor core bonds to the conductor core
material.