Phase shifting generates features in a printed features layer, such as a
printed circuit, that are narrower than the features on a fabrication
layout, such as a mask, projected onto the printed features layer using
the same optical system without phase shifting. Techniques for forming a
fabrication layout for a physical design layout having critical features
employing phase shifting include techniques for providing a layout for
shifters. The techniques include establishing placement of multiple pairs
of shifters for a set of critical features. A critical feature employs
phase shifting. The set of critical features constitutes a subset of all
critical features in a layout. After establishing placement of the pairs
of shifters, phase information for the shifters associated with the set of
critical features is assigned.
This and related techniques expedite resolving phase-shift conflicts in
fabrication layouts for phase-shifted features. Complex designs can lead
to phase-shift conflicts among shifters in the fabrication layout.
According to these techniques, a conflict that cannot be resolved by a
fabrication design process is passed to the design process earlier than in
a conventional processes, saving valuable time in the fabrication process
for printed circuits.