There are provided a photosensitive polymer and a photoresist compositing
containing the same. The photosensitive polymer is represented by the
following formula:
##STR1##
wherein R.sub.1 is an acid-labile tertiary alkyl ester group, R.sub.2 is
hydrogen atom, methyl, ethyl, carboxyl, .gamma.-butyrolactone-2-yl ester,
.gamma.-butyrolactone-3-yl ester, pantolactone-2-yl ester, mevalonic
lactone ester, 3-tetrahydrofuranyl ester, 2,3-propylenecarbonate-1-yl
ester, 3-methyl-.gamma.-butyrolactone-3-yl ester or C.sub.3 to C.sub.20
alicyclic hydrocarbon, a/(a+b+c) is 0.1.about.0.7, b/(a+b+c) is
0.1.about.0.8, c/(a+b+c) is 0.0.about.0.8, and n is an integer in the
range of 0 to 2.