A positive pressure gradient is maintained across an open access port of an
interface chamber such as a load lock chamber which provides an interface
between a low pressure chamber such as a transfer or buffer chamber, and a
high pressure area such as a staging area or factory interface area. When
the access port of the interface chamber is open to the high-pressure
area, the positive pressure gradient may be used in some applications to
inhibit the flow of gasses from the high-pressure area into the interior
of the interface chamber.