A microstructure for steering light is provided that mitigates stiction. A
substrate is provided on which a structural linkage is connected to
support a structural film. The structural film includes a reflective
coating. A hold electrode is connected with the substrate at a position
laterally beyond an orthogonal projection of the structural film on the
substrate. It is configured to hold the structural film electrostatically
in a tilted position with respect to the substrate upon application of a
potential difference between the structural film and the hold electrode.
Because of its positioning with respect to the structural film, it is
ensured that the structural film is not in contact with the substrate when
the structural film is being held by the hold electrode.
