Disclosed is a coating composition for use in producing an insulating thin
film, comprising:
(A) at least one silica precursor comprised of at least one compound
selected from the group consisting of an alkoxysilane and a hydrolysis
product thereof;
(B) at least one organic polymer;
(C) water;
(D) at least one alcohol; and optionally
(E) an organic solvent for a mixture of the components (A), (B), (C) and
(D);
wherein the weight ratio (WR) of the water (C) to the at least one silica
precursor (A) satisfies the formula 0.01
