Palladium silicide (PdSi) schottky electrode for gallium nitride semiconductor devices

   
   

The semiconductor device of the present invention includes: a gallium nitride (GaN) compound semiconductor layer; and a Schottky electrode formed on the GaN compound semiconductor layer, wherein the Schottky electrode contains silicon.

Прибора на полупроводниках присытствыющего вымысла вклюает: слой составного полупроводника нитрида галлия (GaN); и электрод schottky сформировал на слое составного полупроводника GaN, при котором электрод schottky содержит кремний.

 
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