The adhesion of overlying layers to a silicalite-plus-binder dielectric
layer is enhanced by forming a layer that includes the binder in a higher
concentration. The overlying layer, e.g., silicon dioxide, silicon carbide
or silicon nitride, adheres more tightly to the higher-concentration
binder layer. Although the presence of the higher-concentration binder
layer may increase the dielectric constant of the overall
silicalite-plus-binder stack, the increase is generally minimal.
