A metrology system for characterizing three-dimensional structures and
methods for manufacturing and using same. The metrology system includes a
measurement system that preferably comprises an energy source and energy
detector and that is in communication with a processing system. Under
control of the processing system, the metrology system rotates the
measurement system relative to a structure while the energy source directs
a beam of incident energy toward the structure. The incident energy
rebounds from the structure as scattered energy, at least a portion of
which propagates toward the energy detector. Due to the relative rotation,
the energy detector receives scattered energy from the structure at a
plurality of angles, and the measurement system produces data signals
therefrom, which data signals are provided to the processing system. The
processing system analyzes the data signals to determine whether the
structure has any defects, such as yield limiting deviations or other
processing defects.
