A capacitance type dynamic quantity sensor device includes a sensor chip
having movable electrodes and sensor-chip side fixed electrodes disposed
to confront the movable electrodes in a substrate surface horizontal
direction X and a circuit chip disposed to confront the sensor chip. The
movable electrodes are joined to the substrate through spring portions
having degrees of freedom in the substrate surface horizontal direction X
and the substrate surface vertical direction Z, so that the movable
electrodes are displaceable in both the directions X and Z. A circuit-chip
side fixed electrode is equipped at the site corresponding to the movable
electrodes. The sensor chip and the circuit chip are electrically
connected to each other through bump electrodes.
