Method for treating and/or coating a surface of an object, especially for
coating a surface of a substrate such as a semiconductor component or
solar cell, in which the surface is supplied with a gas that contains
particles that will interact and/or react with the surface, forming a
coating thereon. The surface of the object is oriented at an angle .alpha.
from the vertical, and the gas is directed toward the surface such that it
flows along the object by force of convection, starting from the base area
of the surface of the object.