A multiple degree-of-freedom ultra-precision (DOF) robotic system yielding
either rigid body guidance or large deformation analysis (LDRS, i.e.
semi-flexible and flexible robotics) is developed based on the technology
of integrating a multiple DOF ultra-precision shadow robotic measurement
system with a multiple DOF robot for form a closed-loop linkage chain to
establish a corresponding closed-loop feedback control of end-effecter of
said robotic system without the use and limitation of any target or
artificial marker in work-cell as the reference. In this way, the major
degrading problems that greatly drag down the positioning accuracy of a
robot have been fairly resolved. The embodiment conducts the details of
the development of such a multiple DOF ultra-precision robotic system for
the general applications in precision engineering.