A system and method is used for measuring the performance of semiconductor processing
tools. A software component may be used to define a set of performance variables
and associate performance limits. From the set of performance variables, a set
of variables may be selected to create a customized test for a particular tool.
The system may be used to store the results of the tests within the system for
fast comparison with the associated performance limits, with previous test results,
or both. The system may be used to display an overall status of groups of performance variables.
