The present invention provides a cerium-based abrasive slurry particles including
a cerium-based abrasive particle of no less than 95% by weight of total rare earth
oxides (TREO), in which the cerium-based abrasive particle has less than 3% by
weight of fluorine content of TREO, and a particle size distribution determined
by a laser diffraction method is within a predetermined range. And adhesion property
is further improved by setting this fluorine content in 0.005 to 0.5% by weight
of TREO.
