An active matrix substrate comprises a matrix array of TFTs. A double-layered
film includes an under-layer of aluminum-neodymium (AlNd) alloy and an
over-layer of high melting point metal. The double-layered film forms first interconnection
lines for connection to the TFTs. A triple-layered film includes an under-layer
of said high melting point metal, a middle-layer of said AlNd alloy and
an over-layer of the high melting point metal. The triple-layered film forms second
interconnection lines for connection to the TFTs.
