A Microelectromechanical (MEMS) device and method of fabrication that can minimize
derailing of an actuable element of the MEMS device during fabrication can include
a MEMS actuator to selectively generate displacement forces to displace an actuable
element along a path between sidewalls of a channel. The sidewalls can have stops
formed therein that can interact with surfaces on the actuable element to limit
displacement of the actuable element during fabrication. One of the sidewalls can
be indented to form the stops and the actuable element can have an arm portion
that extends between the stops. The sidewalls can be offset to form the stops on
spaced apart faces on opposite sides of the channel and the actuable element can
be offset between the spaced apart faces to form offset faces in an opposing relationship
with the spaced apart faces on the sidewalls. In addition, the actuable element
and the sidewalls may be so shaped as to maintain a generally constant width between them.
